Lyncee Tec Lens-less sensor无透镜传感器

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Lyncee Tec Lens-Less sensor无透镜传感器


The Lens-less sensor is a fixed field of view DHM®, this unique patented design is robust and ideal for industrial applications.  The reflection configuration measures 3D topography with a sub-nanometric resolution.

Digital holography offers significant advantages compare to others 3D optical profilometer :

  • Fast measurement

  • Insensitive to surrounding vibrations

  • Digital focalization : doesn’t require mechanical displacement

  • The laser wavelength is the height reference: no drawbacks from scanning mechanisms

Ideal for automation

  • Compact design for easy integration

  • Camera outside of the main body for easy maintenance

  • External laser source for easy integration and maintenance

Adapted to your needs

  • Single or dual wavelength configuration

  • Long coherence laser source on request

  • High resolution sensor on request



Automated lens-less sensor for wafer inspection



Specifications

  • Field of view : 6mm x 6mm

  • Lateral resolution : 10 um

  • Vertical resolution : 0.5 nm

  • Working distance : 10 mm

  • Acceptance angle : 0.8°

  • CMOS Camera : 4 Mpx